A hierarchical adaptive particle swarm optimizer with diversity maintenance for suppressing edge distortion in DMD lithography

Sensors and Actuators A Physical 2026

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Authors: Shengzhou Huang, Siwen He, Yang Shao, Dongjie Wu, Jiani Pan, Linsong Zhu, Chengcheng Sheng, ChenYi Song

DOI: 10.1016/j.sna.2026.117512

Cited by: 2

References: 39

Fields of Study & Subjects

Advancements in Photolithography Techniques VLSI and FPGA Design Techniques Advanced optical system design

References 39