A high-performance piezoelectric MEMS microspeaker with flexible spring-patterned cantilevers

Sensors and Actuators A Physical 2026

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Authors: Ning Deng, Xinyu Ding, Xudong Ma, Hui Shang, Jin Xu, Ke Cao, Kangfu Chen, Huikai Xie

DOI: 10.1016/j.sna.2026.117522

Cited by: 2

References: 19

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Aeroelasticity and Vibration Control

References 19