High aspect ratio through-wafer etching of AT-cut quartz using double-sided offset apertures

Sensors and Actuators A Physical 2026

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Authors: Kaiwen Chen, Chunyan Yin, Fangmeng Xu, Guangbin Dou

DOI: 10.1016/j.sna.2026.117541

Cited by: 1

References: 32

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Microfluidic and Capillary Electrophoresis Applications Nanofabrication and Lithography Techniques

References 32