Localized electrochemical deposition manufacturing of microcantilevers with various tilt angles and simulation analysis

Sensors and Actuators A Physical 2026

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Authors: Dengguo Xu, Chuntao Meng, Ting Zhu, Qixin Qing

DOI: 10.1016/j.sna.2026.117565

Cited by: 1

References: 27

Fields of Study & Subjects

Force Microscopy Techniques and Applications Electrodeposition and Electroless Coatings Nanofabrication and Lithography Techniques

References 27