High-reliability backside absolute piezoresistive pressure sensors for automotive applications

Sensors and Actuators A Physical 2026

View at publisher

Authors: Bin Song, Fanliang Li, DengFeng Wu, Jun Yang, Xiaoping Wang, Fulong Zhu, Sheng Liu

DOI: 10.1016/j.sna.2026.117573

Cited by: 0

References: 28

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Analog and Mixed-Signal Circuit Design

References 28