Thick-PZT based MEMS resonant viscometer with silicon microneedle array for high-density driving force

Sensors and Actuators A Physical 2026

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Authors: Jiayin Li, Zuhang Zhou, Shuai Liu, Zhiyin Cheng, Hui Liu, Xiaohui Du, Lingyun Wang

DOI: 10.1016/j.sna.2026.117574

Cited by: 1

References: 11

Fields of Study & Subjects

Mechanical and Optical Resonators Advanced Sensor and Energy Harvesting Materials Advanced MEMS and NEMS Technologies

References 11