A high-pressure, high-flow piezoelectric ultrasonic micropump with a novel diaphragm check valve

Sensors and Actuators A Physical 2026

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Authors: Fang Lu, Yuzhe Zhou, Guangda Qiao, Jingjia Zhu, G. Q. Gong, Huayong Yang, Dong Han

DOI: 10.1016/j.sna.2026.117582

Cited by: 2

References: 38

Fields of Study & Subjects

Electrowetting and Microfluidic Technologies Soft Robotics and Applications Microfluidic and Capillary Electrophoresis Applications

References 38