A MEMS comb drive resonator with electrically tunable nonlinearity

Sensors and Actuators A Physical 2026

View at publisher

Authors: Tongtian Zhang, Junhui Wu, J. Joshua Yang, Guangya Zhou

DOI: 10.1016/j.sna.2026.117606

Cited by: 2

References: 31

Fields of Study & Subjects

Mechanical and Optical Resonators Advanced MEMS and NEMS Technologies Innovative Energy Harvesting Technologies

References 31