Quartz-based resonant SAW pressure sensor employing laser-induced etching technique

Sensors and Actuators A Physical 2026

View at publisher
Authors: Dapeng Guo, Zilin Li, Zhengkai Tang, Ruchuan Shi, Chengtao Luo, Hualin Li, Yupeng Yuan, Tao Han
DOI: 10.1016/j.sna.2026.117642
Cited by: 0
References: 20

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Advanced MEMS and NEMS Technologies Ultrasonics and Acoustic Wave Propagation

Publication details

Journal / source
Sensors and Actuators A Physical
Volume
402
Pages
117642–117642
Publication date
23 February 2026
Language
EN