Embedded SAW sensors based on ZnO/Pt/SiO2/Si structure for temperature measurement

Sensors and Actuators A Physical 2026

View at publisher

Authors: Tong Tong, Chunlong Cheng, Yanxin Liu, Cai Qin Luo, Tianyao Luo, Lechen Xiong, Lin Wu, Xiaoyue Gong, Qingqing Ke

DOI: 10.1016/j.sna.2026.117651

Cited by: 1

References: 23

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Gas Sensing Nanomaterials and Sensors Advanced Chemical Sensor Technologies

References 23