Temperature characteristics of MEMS pressure sensor with high proof pressure for adjustable ranges up to 10…60 kPa

Sensors and Actuators A Physical 2026

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Authors: M. Basov

DOI: 10.1016/j.sna.2026.117664

Cited by: 2

References: 56

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Advanced Sensor Technologies Research Sensor Technology and Measurement Systems

References 56