Distributed thermal equivalent circuit modeling of phase noise in oven-controlled piezoresistive MEMS resonators

Sensors and Actuators A Physical 2026

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Authors: Yuqing Mao, Ke Sun, Hao Yu, Yechen Miao, Heng Yang, Xinxin Li

DOI: 10.1016/j.sna.2026.117674

Cited by: 0

References: 20

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Mechanical and Optical Resonators

References 20