A noncontact two-dimensional displacement sensor with nanometer resolution and low crosstalk

Sensors and Actuators A Physical 2026

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Authors: Shuyu Zhu, Rongjie Li, Tao Xu, Zehui Chen, Zhihua Feng
DOI: 10.1016/j.sna.2026.117681
Cited by: 1
References: 25

Fields of Study & Subjects

Sensor Technology and Measurement Systems Mechanical and Optical Resonators Advanced MEMS and NEMS Technologies

Publication details

Journal / source
Sensors and Actuators A Physical
Publisher
Elsevier BV
Volume
402
Pages
117681–117681
Publication date
2 March 2026
Language
EN