Precision tracking of a piezoelectric nanopositioning system via cascaded serial ILC-based variable-parameter closed-loop inversion feedforward control

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Authors: Longhuan Yu, Jianhao Lai, Hai Li (254910), Xianmin Zhang, Sergej Fatikow
Cited by: 0
References: 33

Fields of Study & Subjects

Piezoelectric Actuators and Control Iterative Learning Control Systems Control Systems and Identification

Publication details

Journal / source
Sensors and Actuators A Physical
Volume
403
Pages
117687–117687
Publication date
3 March 2026
Language
EN