Precision tracking of a piezoelectric nanopositioning system via cascaded serial ILC-based variable-parameter closed-loop inversion feedforward control
Fields of Study & Subjects
Piezoelectric Actuators and Control
Iterative Learning Control Systems
Control Systems and Identification
Publication details
- Journal / source
- Sensors and Actuators A Physical
- Volume
- 403
- Pages
- 117687–117687
- Publication date
- 3 March 2026
- Language
- EN