A micro-leverage in-situ residual stress sensor for MEMS devices

Sensors and Actuators A Physical 2026

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Authors: Qi Wang, Ruikun Li, Xingyu Wei, Qiu Wang, Huafeng Liu

DOI: 10.1016/j.sna.2026.117940

Cited by: 1

References: 27

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Magnetic Field Sensors Techniques

References 27