Effects of Si content on mechanical properties and corrosion resistance of cosputtered (TiZrHfTaSi)N films

Surface and Coatings Technology 2026

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Authors: Yung-I Chen, Yan-Zhi Liao, Li-Chun Chang
DOI: 10.1016/j.surfcoat.2026.133188
Cited by: 0
References: 41

Fields of Study & Subjects

Metal and Thin Film Mechanics Advanced ceramic materials synthesis Advanced materials and composites

Publication details

Journal / source
Surface and Coatings Technology
Volume
522
Pages
133188–133188
Publication date
10 January 2026
Language
EN