Decoupling the roles of nitrogen incorporation and thermal annealing in tailoring the structure and mechanical performance of CNx films

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Authors: Y C Zhu, Weiye Li, Zhenguo Lai, Kaixiong Gao, Panfeng Yang, Zhiwei Wang, Lilin Jiang, B Zhang
Cited by: 1
References: 28

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics Tribology and Wear Analysis

Publication details

Journal / source
Surface and Coatings Technology
Publisher
Elsevier BV
Volume
533
Pages
133629–133629
Publication date
25 May 2026
Language
EN