Phase-engineered Y2O3 coatings enabling self-protective fluorinated surfaces for ultralow plasma erosion

Surface and Coatings Technology 2026

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Authors: J Li, Xiaowei Tang, Menglei Han, Fengying Li, Xiaohong Liu, Ji Li, Hui Li, Xiaojun Yang, Chufeng Sun, Lei Shi

DOI: 10.1016/j.surfcoat.2026.133708

Cited by: 1

References: 40

Fields of Study & Subjects

Plasma Diagnostics and Applications Optical Coatings and Gratings Copper Interconnects and Reliability

References 40