Deactivation phenomena of highly B-doped SiGe epitaxial films subjected to nanosecond laser annealing followed by rapid thermal annealing

Surfaces and Interfaces 2026

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Authors: Chunghee Jo, Dae-Hong Ko

DOI: 10.1016/j.surfin.2026.108589

Cited by: 1

References: 60

Fields of Study & Subjects

Silicon and Solar Cell Technologies Semiconductor Quantum Structures and Devices Semiconductor materials and interfaces

References 60