Atomic scale temperature effects on material removal and subsurface damage in nano-polishing of 3C-SiC

Surfaces and Interfaces 2026

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Authors: Huan Liu, Pengyue Zhao, Chao Long, Shuhao Kang, Ruihan Li, Ziteng Li

DOI: 10.1016/j.surfin.2026.108641

Cited by: 1

References: 40

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Advanced ceramic materials synthesis

References 40