Study on Interdiffusion at the interface between HZO and IGZO layers

Surfaces and Interfaces 2026

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Authors: Hye Joo Kang, Seung Wook Ryu, Il‐Kwon Oh

DOI: 10.1016/j.surfin.2026.108737

Cited by: 0

References: 20

Fields of Study & Subjects

Ferroelectric and Negative Capacitance Devices Semiconductor materials and devices Thin-Film Transistor Technologies

References 20