Interactive mechanism of photoelectric field in photoelectrochemical mechanical polishing of GaN

Tribology International 2026

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Authors: Yuewen Sun, Zhijun Chen, Fan Yang, Jiajian Feng, Shang Gao, Renke Kang, ZhiGang DONG
DOI: 10.1016/j.triboint.2026.111827
Cited by: 3
References: 30

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced Machining and Optimization Techniques GaN-based semiconductor devices and materials

Publication details

Journal / source
Tribology International
Publisher
Elsevier BV
Volume
219
Pages
111827–111827
Publication date
19 February 2026
Language
EN