Stress-governed damage evolution in diamond nanoscratching of single crystal 4H-SiC via molecular dynamics simulation

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Authors: Xinhao Li, Qingqing Huang, Guanwei He, Wuqian Li, Jun Zhao, Dekui Mu, Han Huang
Cited by: 3
References: 78

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Silicon Carbide Semiconductor Technologies

Publication details

Journal / source
Tribology International
Publisher
Elsevier BV
Volume
222
Pages
112121–112121
Publication date
30 April 2026
Language
EN