Anisotropic material removal in ultra-precision micro grinding of single crystal 4H-SiC: Process signals and surface damage evolution

Tribology International 2026

View at publisher

Authors: Xiaoyu Bao, Xingyu Wang, Wen Zheng, Sheng Wang, Qingliang Zhao, Yong Lu

DOI: 10.1016/j.triboint.2026.112168

Cited by: 1

References: 70

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced machining processes and optimization Diamond and Carbon-based Materials Research

References 70