Improving mechanical and tribological properties of Ta, N co-doped DLC coatings by adjusting the tantalum target current

Tribology International 2026

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Authors: Mingming Yan, Baogui Qian, Hang Lei, C Wang, Xuemei Wei, Jinlong Li, Lei Shan, Junying Hao

DOI: 10.1016/j.triboint.2026.112356

Cited by: 1

References: 50

Fields of Study & Subjects

Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research Copper Interconnects and Reliability

References 50