Effect of the working pressure on the structural, morphological, optical, electrical and gas sensor properties of ZnO films grown by DC magnetron sputtering

Thin Solid Films 2026

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Authors: V. Cerqueira Silva, Bill D. Aparicio Huacarpuma, Carlos A. Vilca Huayhua, F.F.H. Aragón, J.A.H. Coaquira
DOI: 10.1016/j.tsf.2026.140863
Cited by: 3
References: 56

Fields of Study & Subjects

ZnO doping and properties Gas Sensing Nanomaterials and Sensors Thin-Film Transistor Technologies

Publication details

Journal / source
Thin Solid Films
Publisher
Elsevier BV
Volume
835
Pages
140863–140863
Publication date
14 January 2026
Language
EN