Conductivity mechanisms of the nanocomposite SiOx(Si)&CuyO(Cu) films

Thin Solid Films 2026

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Authors: Oleh Bratus, Antonina Kykot, Anton Semeniuk, Sławomir Prucnal, Pāvels Onufrijevs, J. Kaupužs, S. Bugaychuk, Tetiana Sydorenko, Volodymyr V. Ilchenko, В. В. Марін, Igor Sokolovskyi, Tomash Sabov
+1 more Anatoliy Evtukh
DOI: 10.1016/j.tsf.2026.140874
Cited by: 1
References: 58

Fields of Study & Subjects

Copper Interconnects and Reliability Copper-based nanomaterials and applications Dielectric properties of ceramics

Publication details

Journal / source
Thin Solid Films
Publisher
Elsevier BV
Volume
836
Pages
140874–140874
Publication date
24 January 2026
Language
EN