Preparation of highly transparent and low resistive indium tin oxide thin film by direct current low-power sputtering

Thin Solid Films 2026

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Authors: Xueqi Chen, Manyao Wang, Zongyu Huang, Xiang Qi
DOI: 10.1016/j.tsf.2026.140892
Cited by: 2
References: 21

Fields of Study & Subjects

ZnO doping and properties Thin-Film Transistor Technologies Gas Sensing Nanomaterials and Sensors

Publication details

Journal / source
Thin Solid Films
Publisher
Elsevier BV
Volume
837
Pages
140892–140892
Publication date
14 February 2026
Language
EN