Temperature-stable dielectrics for TiO2 film prepared by thermal oxidation
Fields of Study & Subjects
Semiconductor materials and devices
Dielectric properties of ceramics
Ferroelectric and Piezoelectric Materials
Publication details
- Journal / source
- Thin Solid Films
- Volume
- 837
- Pages
- 140893–140893
- Publication date
- 16 February 2026
- Language
- EN