Three stages of Si transformation into SiC by the method of coordinated substitution of atoms

Thin Solid Films 2026

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Authors: S. A. Kukushkin, Е. В. Убыйвовк, M.G. Vorob'ev, А. С. Гращенко, Andrei V. Osipov

DOI: 10.1016/j.tsf.2026.140908

Cited by: 0

References: 39

Fields of Study & Subjects

Silicon Carbide Semiconductor Technologies Semiconductor materials and interfaces Diamond and Carbon-based Materials Research

References 39