Design, fabrication, and characterization of a novel cantilever-based PMUT incorporating a central spring-like folded beam with enhanced transmission performance for air applications

Ultrasonics 2026

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Authors: Yanyuan Ba, Y.C. Li, Yue Wang

DOI: 10.1016/j.ultras.2026.107978

Cited by: 2

References: 29

Fields of Study & Subjects

Ultrasound Imaging and Elastography Piezoelectric Actuators and Control Advanced MEMS and NEMS Technologies

References 29