Lateral-mode bulk acoustic wave resonators enabled three-dimensional nanostructure array fabrication

Ultrasonics 2026

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Authors: Wei Wei, Zhaoxun Wang, Yiming Liu, Xuexin Duan, Menglun Zhang

DOI: 10.1016/j.ultras.2026.107993

Cited by: 0

References: 33

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Nanofabrication and Lithography Techniques Piezoelectric Actuators and Control

References 33