Particle deposition driven by plasma discharge in magnetron sputtering of TiOx compound targets

Vacuum 2026

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Authors: Qiaoru An, Feng Shi, Haisheng Fang

DOI: 10.1016/j.vacuum.2026.115067

Cited by: 0

References: 52

Fields of Study & Subjects

Plasma Diagnostics and Applications Metal and Thin Film Mechanics Copper Interconnects and Reliability

References 52