Optimization of factors influencing microwave plasma modification of single-crystal SiC (0001)

Vacuum 2026

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Authors: Mengmeng Shen, Yulu Yang, Min Wei, Yiwei Liang, Lingwei Wu, Jiahao Ye, Hongyu Chen, Wei Hang

DOI: 10.1016/j.vacuum.2026.115076

Cited by: 6

References: 25

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced ceramic materials synthesis High-Temperature Coating Behaviors

References 25