Distribution of ion energy and concentration in the expansion region of radio-frequency inductive coupled plasmas with deuterium and deuterium-nitrogen mixtures

Vacuum 2026

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Authors: Xiao Xi, Xuxu Liu, Wei Jin, Jipeng Zhu, Hai Jin, Xiaoqiu Ye, Changan Chen

DOI: 10.1016/j.vacuum.2026.115125

Cited by: 2

References: 69

Fields of Study & Subjects

Plasma Diagnostics and Applications Laser Design and Applications Plasma Applications and Diagnostics

References 69