Composition-dependent structural and optical properties of combinatorially deposited, RF sputtered gallium oxynitride layers

Vacuum 2026

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Authors: Marcell Gajdics, Ildikó Cora, Tamás Kolonits, György Sáfrán, E. Szilágyi, Z. Zolnai, Bela Pecz

DOI: 10.1016/j.vacuum.2026.115133

Cited by: 1

References: 37

Fields of Study & Subjects

Ga2O3 and related materials GaN-based semiconductor devices and materials 2D Materials and Applications

References 37