Study on debris contamination characteristics and control methods of DPP-type EUV light source

Vacuum 2026

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Authors: Guo Yang, Xinjian Zhu, Jiale Zheng, Chenhao Zhou, Guanjun Huang, Xiao Ling, Lin Jiang, Jianhua Zhang

DOI: 10.1016/j.vacuum.2026.115156

Cited by: 0

References: 26

Fields of Study & Subjects

Advancements in Photolithography Techniques Plasma Diagnostics and Applications Fusion materials and technologies

References 26