Gettering performance and activation characteristics of Ti-Co-Ce getter films deposited by magnetron sputtering

Vacuum 2026 Open access

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Authors: Yuhua Xiong, Huating Wu, Xin Shi, Siwei Tang

DOI: 10.1016/j.vacuum.2026.115187

Cited by: 0

References: 26

Fields of Study & Subjects

Semiconductor materials and devices Advanced Materials and Semiconductor Technologies Semiconductor materials and interfaces

References 26