TiN films deposited by low-temperature magnetron sputtering on polyethylene to improve its hydrophobicity and hardness

Vacuum 2026

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Authors: Pauline Lefèbvre, F. Charlot, Stéphane Coindeau, G. Berthomé, Nicolas Coulmy, Pascal Hagenmuller, Arnaud Mantoux, Elisabeth Blanquet
DOI: 10.1016/j.vacuum.2026.115198
Cited by: 1
References: 41

Fields of Study & Subjects

Metal and Thin Film Mechanics Surface Modification and Superhydrophobicity Copper Interconnects and Reliability

Publication details

Journal / source
Vacuum
Publisher
Elsevier BV
Volume
248
Pages
115198–115198
Publication date
17 February 2026
Language
EN