Ge-condensed UT-SGOI as a CMOS-compatible template for thick LPCVD SiGe: Reduced trap signatures and improved electrical response

Vacuum 2026

View at publisher
Authors: K.M.A. Saron, Adam Arette-Hourquet, Ismail Madaci, Mathieu Abel, Anne-Flore Mallet, Olivier Gourhant, Isabelle Berbezier, A.K. Aladim, S. Ghalab, Zaineb Mohamed, Majed Alharbi, Mohammed Ibrahim
+1 more Mansour Aouassa
DOI: 10.1016/j.vacuum.2026.115213
Cited by: 4
References: 32

Fields of Study & Subjects

Silicon and Solar Cell Technologies Thin-Film Transistor Technologies Semiconductor materials and interfaces

Publication details

Journal / source
Vacuum
Publisher
Elsevier BV
Volume
248
Pages
115213–115213
Publication date
25 February 2026
Language
EN