Thermal stability of the tetragonal β-phase in Ta thin films deposited by electron-beam evaporation
Fields of Study & Subjects
Metal and Thin Film Mechanics
Metallurgical and Alloy Processes
Titanium Alloys Microstructure and Properties
Publication details
- Journal / source
- Vacuum
- Volume
- 248
- Pages
- 115217–115217
- Publication date
- 25 February 2026
- Language
- EN