Properties of carbon coatings obtained by unipolar and bipolar mixed-mode high-power impulse magnetron sputtering

Vacuum 2026

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Authors: A.N. Zakharov, V.O. Oskirko, M.I. Azhgikhin, A.S. Grenadyorov, A.A. Solovyev
DOI: 10.1016/j.vacuum.2026.115232
Cited by: 6
References: 31

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics Advanced Materials and Semiconductor Technologies

Publication details

Journal / source
Vacuum
Publisher
Elsevier BV
Volume
248
Pages
115232–115232
Publication date
4 March 2026
Language
EN