Preparation and characterization of heteroepitaxial Zn2GeO4 films deposited on Yttria-Stabilized ZrO2 (100) substrates via magnetron sputtering

Vacuum 2026 Open access

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Authors: Yiwei Xue, Yantao Xu, Chenglong Du, Xiangwu Li, Caixun Bai, Guomei Wang, Cheng Lu, Wenfei Zhang, Shenggui Fu, Zhao Li, Zhao Li

DOI: 10.1016/j.vacuum.2026.115244

Cited by: 0

References: 35

Fields of Study & Subjects

ZnO doping and properties Thin-Film Transistor Technologies Advanced Materials and Semiconductor Technologies

References 35