Effect of cyclic post-oxidation on the characteristics and properties of plasma-nitrided layer

Vacuum 2026

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Authors: Yongchuang Zhao, Jia Ni, Lin Qi, Jing Hu, Xulong An, Wei Wei

DOI: 10.1016/j.vacuum.2026.115269

Cited by: 2

References: 14

Fields of Study & Subjects

Metal and Thin Film Mechanics Copper Interconnects and Reliability Plasma Diagnostics and Applications

References 14