Improving film thickness uniformity on curved substrates via planar and cylindrical magnetron sputtering: Simulation and experimental validation

Vacuum 2026

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Authors: Ravit Pulyani, Simran Atwal, S.K. Ghosh, D. Bhattacharyya, A. Biswas

DOI: 10.1016/j.vacuum.2026.115337

Cited by: 2

References: 23

Fields of Study & Subjects

Advanced X-ray Imaging Techniques Nuclear Physics and Applications Surface Roughness and Optical Measurements

References 23