Effects of magnetic field asymmetry on plasma characteristics, structure, tribological and corrosion properties of CrxN coatings deposited by sputtering

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Authors: Qibo Xia, Zhenghao Ren, Ganggang Wang, Haojie Chen, Liwei Zheng, Shusheng Xu
Cited by: 3
References: 44

Fields of Study & Subjects

Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research Surface Treatment and Coatings

Publication details

Journal / source
Vacuum
Publisher
Elsevier BV
Volume
250
Pages
115342–115342
Publication date
8 April 2026
Language
EN