Roughness reduction of oxide substrates to sub-nanometer using material addition

Vacuum 2026 Open access

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Authors: Daljin Jacob, Pradeep Kumar Rana, Peela Lasya, Keshav Kumar Jha, Allamula Ashok, Elangovan Hemaprabha, Satyesh Kumar Yadav

DOI: 10.1016/j.vacuum.2026.115520

Cited by: 1

References: 27

Fields of Study & Subjects

ZnO doping and properties Surface Roughness and Optical Measurements Semiconductor materials and devices

References 27