Influence of chemical bonding on the material removal of tantalum for the application of chemical mechanical polishing

Wear 2026

View at publisher

Authors: Jiaxin Zheng, Liang Jiang, Yongshun Zhang, Xia Zhong, Yuting Wei, Liao Zhou, Shijie Zhao, Linmao Qian

DOI: 10.1016/j.wear.2026.206581

Cited by: 2

References: 54

Fields of Study & Subjects

Advanced Surface Polishing Techniques Force Microscopy Techniques and Applications Advanced machining processes and optimization

References 54