A piezoelectric stack-actuated gas microflow valve with high precision and fast response
Fields of Study & Subjects
Piezoelectric Actuators and Control
Microfluidic and Capillary Electrophoresis Applications
Soft Robotics and Applications
Publication details
- Journal / source
- Mechanical Systems and Signal Processing
- Publisher
- Elsevier BV
- Volume
- 249
- Pages
- 114107–114107
- Publication date
- 5 March 2026
- Language
- EN