Step-by-Step Shouldering Growth of (100) β-Ga2O3 with Large Thickness

View at publisher
Authors: Yuzhe Bu, Wenjuan Yang, Haotian Huang, Qinglin Sai, Hongji Qi
Cited by: 1
References: 26

Abstract

Abstract β-Ga2O3 crystals are anisotropic, which is also reflected in their growth habits. This is manifested in the occurrence of phenomena such as miscellaneous crystals and twin crystals due to the competition between different crystal planes, which affects the growth of large sizes. However, this anisotropic growth is not all a drawback; instead, it can be utilized to achieve the growth of specific crystal planes. In this article, by analyzing the growth dynamics mechanism of different crystal planes of β-Ga2O3, we qualitatively determined the suitable growth intervals for different crystal planes, and actively designed the thermal field and growth process that meet the requirements, successfully achieving the expected results. We conducted phased control over the shoulder expansion of (100) plane, obtaining high-quality β-Ga2O3 single crystals.

Fields of Study & Subjects

Ga2O3 and related materials GaN-based semiconductor devices and materials Copper-based nanomaterials and applications

Publication details

Journal / source
Crystal Growth & Design
Publisher
American Chemical Society (ACS)
Volume
26
Issue
12
Pages
4453–4458
Publication date
26 May 2026
Language
EN